ZEISS Crossbeam 550
Specifications
- Emittor: FEG
- Accelerating voltage:
0.02-30 kV (SEM); 0.5-30 kV (FIB)
- Resolution: 0.7 nm at 30 kV (STEM mode);
1.6 nm at 1 kV (SEM mode);3 nm at 30 kV (FIB mode)
Detectors:
- SE
- InLens (in-column SE detector)
- EsB (Energy-selective in-column backscattered electron detector)
- BSD (retractable backscattered electron detector)
- STEM
Analytical detectors:
- EDX spectrometer: OI Ultim Max
- EBSD: OI Symmetry EBSD CMOS detector
- Cathodoluminescence detector
Location
Room: E. 108
Safety instructions for instrument operation and lab (instrument and lab specific!)